Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

An actuatable capacitive transducer comprising:

• a transducer body;
• a plurality of multi-plate capacitors each possessing a displaceable electrode, wherein at least one multi-plate capacitor is electrically configured as an electrostatic actuator, and wherein at least one multi-plate capacitor is electrically configured as a capacitive displacement sensor;
• means for mechanically coupling the displaceable electrodes of the plurality of multi-plate capacitors to form a displaceable electrode unit which is displaceable relative to the transducer body;
• and
• an electrically-conductive indenter mechanically coupled to the means for mechanically coupling so as to be displaceable in unison with the displaceable electrode unit.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating an actuatable capacitive transducer, wherein actuating includes adjusting voltages supplied to the actuatable capacitive transducer;
• recording signals required to generate a representation of a force-displacement relationship;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating an actuatable capacitive transducer;
• controlling a displacement resulting from actuating the actuatable capacitive transducer;
• recording signals required to generate a force-displacement curve;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating an actuatable capacitive transducer;
• controlling a contact force resulting from indenting the sample;
• recording signals required to generate a curve representative of the contact force versus a penetration depth;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating a piezoelectric actuator while operating an actuatable capacitive transducer in a single-sided force-feedback control mode;
• recording signals required to generate a contact force versus penetration depth curve;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating a piezoelectric actuator while operating an actuatable capacitive transducer in a double-sided force-feedback control mode;
• recording signals required to generate a force-displacement curve;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample by actuating an actuatable capacitive transducer;
• controlling a contact force resulting from indenting the sample whenever the contact force is above a specified contact force and controlling a displacement resulting from actuating the actuatable capacitive transducer whenever the contact force is below the specified contact force;
• recording signals required to generate a contact force versus penetration depth curve;
• and
• recording a stream of transmission electron microscopy images illustrating one or more aspects of indenting the sample.

A method of quantitative nanoindentation combined with transmission electron microscopy comprising:

• indenting a sample;
• recording signals required to generate a contact force versus a penetration depth curve;
• and
• recording a stream of electron diffraction patterns illustrating one or more aspects of indenting the sample.

A method of positioning an indenter relative to a substantially wedge-shaped sample having a plateau, a first inclined sidewall, and a second inclined sidewall, the method comprising:

• using the indenter to generate a scanning probe microscopy topography image illustrating a portion of the plateau, a portion of the first inclined sidewall, and a portion of the second inclined sidewall;
• determining a three-dimensional spatial orientation of the plateau from the image;
• determining a width of the plateau from the image;
• and
• positioning the indenter relative to the plateau using the width of the plateau and the three-dimensional spatial orientation of the plateau as a guide.

An actuatable capacitive transducer comprising:

• a transducer body;
• a capacitor including a displaceable electrode and electrically configured as an electrostatic actuator;
• a multi-plate capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor;
• means for mechanically coupling the displaceable electrode of the capacitor electrically configured as an electrostatic actuator to the displaceable electrode of the multi-plate capacitor electrically configured as a capacitive displacement sensor to form a displaceable electrode unit which is displaceable relative to the transducer body;
• and
• an electrically-conductive indenter mechanically coupled to the means for mechanically coupling so as to be displaceable in unison with the displaceable electrode unit.