Method of manufacturing vibration gyro sensor element, vibration gyro sensor element, and method of adjusting vibration direction

A vibration gyro sensor element comprising a cantilever vibrator having:

• a lower electrode;
• a piezoelectric thin film;
• and
• an upper electrode,
• wherein;
• said vibration gyro sensor element is configured to detect an angular rate using the piezoelectric effect of the piezoelectric thin film;
• the cantilever vibrator includes, as the upper electrode, a drive electrode to which a voltage causing the vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other and the drive electrode such that the drive electrode is positioned between the first and second detection electrodes and does not come into contact with the detection electrodes,
• the vibrator is ground by a laser light irradiation based on detection signals detected in the first and second detection electrodes when there is a difference between the detection signals detected in the first and second detection electrodes,
• the detection signals are obtained when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency.