Micromechanical motion sensor
AssigneeRobert Bosch GmbH
InventorsDietmar Krieg, Udo-Martin Gomez, Reinhard Neul
Life of this patent
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Abstract
A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.
Claims17
-16. (canceled)
A micromechanical motion sensor, comprising:
- an electrostatic oscillating drive;
- an oscillatably mounted bar spring element capable of being excited to a permanent periodic oscillation by the electrostatic oscillating drive to which a periodic drive voltage is applied;
- an electrostatic compensation drive arrangement acting upon the bar spring element, wherein:
- an appropriate periodic compensation voltage is applied to the electrostatic compensation drive arrangement to compensate for a non-linearity of a resonance frequency response of the bar spring element;
- and
- an arrangement for detecting a deflection imparted to the bar spring element.
Dependencies are inferred from the claim text.