Probe replacement method for scanning probe microscope

A probe replacement method for a scanning probe microscope comprising:

• a cantilever having a probe at the distal end and a cantilever holder at the basal end;
• and a measurement unit for measuring a physical quantity generated between said probe and a sample when said probe scans the surface of said sample in a configuration in which the surface of said sample is scanned with said probe and the surface of the sample is measured while said physical quantity is kept constant by the measuring unit;
• a cantilever mount provided with a mechanism for attaching and detaching said cantilever via said cantilever holder, a cantilever storage unit for storing a plurality of cantilevers, first movement means for moving the position of the cantilever storage unit, and observation means for observing the position of the mounted cantilevers;
• and
• a positioning mechanisms moved by said first movement means, for adjusting the position of said cantilever attached to said cantilever mount, said method comprising:
• steps for performing alignment between said cantilever mount and said cantilever storage unit using said first movement means, selecting one cantilever from said cantilever storage unit, and mounting the cantilever on said cantilever mount via said cantilever holder;
• a step for performing alignment between said positioning mechanism and said cantilever mount on which said cantilever is mounted, using said first movement means;
• a step for capturing an image of said mounted cantilever using said observation means after said selected cantilever is mounted on said cantilever mount;
• and
• steps for changing the position of said cantilever with respect to said cantilever mount using said positioning mechanism and moving the position of said cantilever to a prescribed position in the field of view of said observation means.