Graphite heating furnace
AssigneeFurukawa Electric Co., Ltd.
InventorTadashi TAKAHASHI
Life of this patent
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Abstract
A gas supplying unit supplies a nitrogen gas into a furnace body of a graphite heating furnace in which at least a part of the furnace body is formed with a graphite. An exhausting unit exhausts a gas inside the furnace body to outside the furnace body. A dew-point temperature of the nitrogen gas supplied into the furnace body is equal to or lower than −80° C. A pressure inside the furnace body is equal to or higher than 140 Pa with respect to an atmospheric pressure outside the furnace body.
Claims6
A graphite heating furnace of which at least a part of a furnace body is formed with a graphite, the graphite heating furnace comprising:
- a gas supplying unit that supplies a nitrogen gas into the furnace body;
- and
- an exhausting unit that exhausts a gas inside the furnace body to outside the furnace body, wherein
- a dew-point temperature of the nitrogen gas supplied into the furnace body is equal to or lower than −80 degrees Celsius, and
- a pressure inside the furnace body is equal to or higher than 140 pascals with respect to an atmospheric pressure outside the furnace body.
Dependencies are inferred from the claim text.