US 2007/0179658 A1 · SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS

Abstract

Operating information about an operating part for performing an operation for processing in a substrate processing apparatus is detected by a detector, and is transmitted as an operating information signal from a unit controller to a data controller. An obtaining part in the data controller accumulates such operating information signals to obtain operating state transition information indicating a change with time in operating state of the operating part, and judges whether or not the operating state transition information is abnormal. When the operating state transition information is abnormal, a warning signal indicating that the operating state of the operating part is abnormal is transmitted from the data controller to a main controller. When the main controller receives the warning signal, a warning issuing part in the main controller issues a warning indicating that there is a possibility of the occurrence of a failure in the operating part.

Claims8

Dependent claims

A system for processing a substrate, comprising:

a substrate processing apparatus for performing a predetermined process on a substrate;
and
a monitoring controller for monitoring the operation of said substrate processing apparatus, said substrate processing apparatus and said monitoring controller being connected to each other,
said substrate processing apparatus including
an operating part for performing an operation for said predetermined process,
a detector for detecting operating information about said operating part, and
a main controller for managing the operation of said operating part,
said monitoring controller including
an obtaining part for obtaining operating state transition information indicating a change with time in operating state of said operating part, based on the operating information about said operating part transmitted from said detector, and
a teaching part for transmitting a warning signal indicating that the operating state of said operating part is abnormal to said main controller when said operating state transition information is abnormal.

7 more elements

A substrate processing apparatus for performing a predetermined process on a substrate, comprising:

an operating part for performing an operation for said predetermined process;
a detector for detecting operating information about said operating part;
a main controller for managing the operation of said operating part;
and
a monitoring controller for monitoring the operation of said substrate processing apparatus, said monitoring controller including
an obtaining part for obtaining operating state transition information indicating a change with time in operating state of said operating part, based on the operating information about said operating part transmitted from said detector, and
a teaching part for transmitting a warning signal indicating that the operating state of said operating part is abnormal to said main controller when said operating state transition information is abnormal.

4 more elements

Dependencies are inferred from the claim text.

Substrate processing system capable of monitoring operation of substrate processing apparatus

Life of this patent

Substrate processing system capable of monitoring operation of substrate processing apparatus

Life of this patent

Abstract

Claims8