Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process

A polymer comprising recurring units having any one of the general formulas (1a) to (1c):

• wherein R1 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group of 1 to 20 carbon atoms in which any constituent —CH2— moiety may be replaced by —O— or —C(═O)—, R3 and R4 are each independently hydrogen or a straight, branched or cyclic monovalent hydrocarbon group of 1 to 8 carbon atoms, R5 and R6 each are hydrogen, fluorine, methyl or trifluoromethyl, W is —CH2— or —O—, and k1 is 0 or 1.

A polymer comprising recurring units having any one of the general formulas (2a) to (2c):

• wherein R1 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group of 1 to 20 carbon atoms in which any constituent —CH2— moiety may be replaced by —O— or —C(═O)—, R5 and R6 each are hydrogen, fluorine, methyl or trifluoromethyl, R7 is a straight, branched or cyclic monovalent hydrocarbon group of 2 to 8 carbon atoms, W is —CH2— or —O—, and k1 is 0 or 1.

A polymer comprising recurring units having any one of the general formulas (3a) to (3c):

• wherein R1 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group of 1 to 20 carbon atoms in which any constituent —CH2— moiety may be replaced by —O— or —C(═O)—, R5 and R6 each are hydrogen, fluorine, methyl or trifluoromethyl, W is —CH2— or —O—, k1 is 0 or 1, and k2 is 1 or 2.

A polymer comprising recurring units having any one of the general formulas (4a) to (4c):

• wherein R1 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group of 1 to 20 carbon atoms in which any constituent —CH2— moiety may be replaced by —O— or —C(═O)—, R5 and R6 each are hydrogen, fluorine, methyl or trifluoromethyl, W is —CH2— or —O—, and k1 is 0 or 1.