Method of cleaning a probe

Abstract

A probe having a tip is cleaned with a cleaning sheet having a base sheet, a foamed layer of a porous material including non-fibrous abrading particles and air bubbles on the base sheet and a polishing layer formed on the foamed layer by causing a surface of the polishing layer to be pressed against the tip of the probe and the tip of the probe to penetrate the polishing layer and further to be inserted into the foamed layer having abrading particles dispersed inside. Such a cleaning sheet may be produced by preparing a paint having air bubbles dispersed inside by mechanically foaming a foaming material containing a foaming resin material and abrading particles, forming on the base sheet a foamed layer having abrading particles dispersed inside by coating a surface of the base sheet with this paint and drying it, and forming a polishing layer on the foamed layer.

Dependencies are inferred from the claim text.