Particle reduction on surfaces of chemical vapor deposition processing apparatus
AssigneeApplied Materials, Inc.
InventorsSoo Young Choi, John M. White, Beom Soo Park, Dong Kil Yim
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Abstract
A method of reducing the amount of particulates generated from the surface of a processing component used during plasma enhanced chemical vapor deposition of thin films. The body of the processing component comprises an aluminum alloy, and an exterior surface of said processing component is texturized to increase the amount of surface area present on the exterior surface. The texturizing process includes at least one step in which the surface to be texturized is bead blasted or chemically grained, so that the surface roughness of the texturized surface ranges from about 50 μ-inch Ra to about 1,000 μ-inch Ra.
Claims21
A method of reducing the amount of particulates generated from the surface of a component which is exposed to plasma discharge within a plasma enhanced chemical vapor deposition processing chamber, wherein said component comprises an aluminum alloy, and wherein an exterior surface of said component is texturized to increase the amount of surface area present on said exterior surface.
A method of reducing the amount of particulates generated from the surface of a process gas diffuser used during plasma enhanced chemical vapor deposition of thin films, wherein the body of said gas diffuser comprises an aluminum alloy, and wherein an exterior surface of said gas diffuser is texturized to increase the amount of surface area present on said exterior surface.
A component for use in a PECVD processing chamber, wherein said component is selected from the group consisting of a gas diffuser, a process chamber liner, a substrate support assembly, a shadow frame, and a slit valve cavity, wherein said component comprises an aluminum alloy, and wherein an exterior surface of said component has been texturized to have a surface roughness ranging from about 50 μ-inch Ra to about 1,000 μ-inch Ra.
Dependencies are inferred from the claim text.