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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTaku Hirayama, Hideo Hada, Satoshi Fujimura, Takeshi Iwai, Mitsuru Sato, Ryoichi Takasu, Toshikazu Tachikawa, Jun Iwashita, Keita Ishiduka, Tomotaka Yamada, Toshikazu Takayama, Masaaki Yoshida
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A resist composition which is stable relative to solvents used in immersion lithography processes and displays excellent sensitivity and resist pattern profile, and a method of forming a resist pattern that uses such a resist composition are provided. The resist composition is in accordance with predetermined parameters, or is a positive resist composition comprising a resin component (A) which contains an acid dissociable, dissolution inhibiting group and displays increased alkali solubility under the action of acid, an acid generator component (B), and an organic solvent (C), wherein the component (A) contains a structural unit (a1) derived from a (meth)acrylate ester containing an acid dissociable, dissolution inhibiting group, but contains no structural units (a0), including structural units (a0-1) containing an anhydride of a dicarboxylic acid and structural units (a0-2) containing a phenolic hydroxyl group.
An evaluation method of suitability of a resist composition as a positive resist composition used in a resist pattern formation method that comprises an immersion exposure step, wherein if a sensitivity when a 1:1 line and space resist pattern of 130 nm is formed by a normal exposure lithography process using a light source with a wavelength of 193 nm is termed X1, and a sensitivity when an identical 1:1 line and space resist pattern of 130 nm is formed by a simulated immersion lithography process in which a step for bringing a solvent for said immersion lithography in contact with said resist film is inserted between a selective exposure step and a post exposure baking step of a normal exposure lithography process using a light source with a wavelength of 193 nm is termed X2, and if an absolute value of [(X2/X1)−1]×100 is no more than 8.0, then the resist composition is decided to be suitable.
An evaluation method of suitability of a resist composition as a negative resist composition used in a resist pattern formation method that comprises an immersion exposure step, wherein if a sensitivity when a 1:1 line and space resist pattern of 160 nm is formed by a normal exposure lithography process using a light source with a wavelength of 193 nm is termed X1′, and a sensitivity when an identical 1:1 line and space resist pattern of 160 nm is formed by a simulated immersion lithography process in which a step for bringing a solvent for said immersion lithography in contact with said resist film is inserted between a selective exposure step and a post exposure baking step of a normal exposure lithography process using a light source with a wavelength of 193 nm is termed X2′, and if an absolute value of [(X2′/X1′)−1]×100 is no more than 8.0, then the resist composition is decided to be suitable.
Dependencies are inferred from the claim text.