Epitaxial thin films
OwnerAndrew Hunt, Girish Deshpande +2inventors
InventorsAndrew Hunt, Girish Deshpande, Wen-Yi Lin, Tzyy-Jiuan Hwang
Life of this patent
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Abstract
Epitaxial thin films are formed on textured substrates. An electrode is formed on the exposed surface of the thin film; the textured substrate removed, and second electrode is formed on the thin film on the side opposite the first electrode. A capacitor is thereby formed.
Claims20
A method of making a high permittivity dielectric layer between a pair of opposing electrodes comprising the steps of:
- forming, as said high permittivity dielectric layer, an epitaxial thin film on a textured substrate;
- forming one of said electrodes on an exposed surface of said thin film;
- wholly or partially removing said textured substrate;
- and
- forming an electrical connection to access said high permittivity dielectric layer on the side of said textured substrate.
A method of making a dielectric layer between a pair of opposing electrodes comprising the steps of:
- forming, as said dielectric layer, an epitaxial cerate or zirconate thin film on a textured substrate;
- forming one of said electrodes on an exposed surface of said cerate or zirconate thin film;
- wholly or partially removing said textured substrate;
- and
- forming an electrical connection to access said dielectric layer on the side of said textured
- substrate.
A method of making a conductive oxide dielectric layer between a pair of opposing electrodes comprising the steps of:
- forming, as said conductive oxide dielectric layer, an epitaxial thin film on a textured substrate;
- forming one of said electrodes on an exposed surface of said thin film;
- wholly or partially removing said textured substrate;
- and
- forming an electrical connection to access said conductive oxide dielectric layer on the side of said textured substrate.
Dependencies are inferred from the claim text.