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US 2007/0178020 A1Published application
Temperature control apparatus and method
AssigneeNoah Precision, LLC
InventorsBoris Atlas, Yefim Bichutskiy, Boris Bruk
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AssigneeNoah Precision, LLC
InventorsBoris Atlas, Yefim Bichutskiy, Boris Bruk
Estimating the term…
An apparatus for use with a process liquid for controlling the temperature of a semiconductor-processing target comprises first and second tanks adapted for holding process liquid, at least one fluid level sensor carried by the first tank for monitoring the amount of process liquid in the first tank, and a valve coupled to one of the at least one fluid level sensor and configured to increases the flow of process liquid from the second tank to the target when the amount of process liquid in the first tank drops to a first predetermined amount. The first tank may include first and second compartments partially separated by a divider with a top whereby process liquid in the first compartment flows over the top of the divider into the second compartment.
An apparatus for use with a process liquid for controlling the temperature of a semiconductor processing target comprising a first tank adapted for holding process liquid and having an inlet and outlet, a first liquid passageway connected to the outlet for returning process liquid to the target, at least one fluid level sensor carried by the first tank for monitoring the amount of process liquid in the first tank, a second tank adapted for holding process liquid, a second liquid passageway connected to the second tank to allow process liquid to flow from the second tank to the target, a valve disposed in the second liquid passageway and coupled to one of the at least one fluid level sensor whereby the valve increase the flow of process liquid through the second liquid passageway when the amount of process liquid in the first tank drops to a first predetermined amount.
An apparatus for use with a process liquid for controlling the temperature of a target, comprising a tank for holding process liquid and having first and second compartments, the first compartment receiving process liquid from the target and the second compartment supplying process liquid to the target, a divider partially separating the first and second compartments and having a top whereby process liquid in the first compartment flows over the top of the divider into the second compartment, and a pump adapted to draw the process liquid from the second compartment toward the target.
An apparatus for use with a process liquid for controlling the temperature of a target, comprising a tank adapted for holding process liquid and having an inlet for receiving the process liquid from the target and an outlet for returning the process liquid to the target, a pump for drawing the process liquid out of the tank and having an input and an output, a heat exchanger having a process liquid input and a process liquid output, a first liquid passageway for fluidly coupling the output of the pump to the process liquid input of the heat exchanger, a second liquid passageway for fluidly coupling the process liquid output of the heat exchanger to the inlet of the tank, at least one digital valve disposed in the second liquid passageway of the tank, and a controller coupled to the at least one digital valve and configured to determine a period of time to open the at least one digital valve to allow a portion of the process liquid from the output of the pump to be diverted toward the tank through the heat exchanger.
Dependencies are inferred from the claim text.