Liquid chemical supply system

A liquid chemical supply system, comprising:

• a liquid chemical pump having a pump chamber for supplying a liquid chemical, a volume variation member that will vary the volume of the pump chamber, and an urging means for urging the volume variation member in a predetermined direction, the liquid chemical pump having the volume variation member operated in resistance to the urging force of the urging means, and will intake and discharge the liquid chemical based upon a change in the volume of the pump chamber in accordance with that operation;
• an operation means for causing the volume variation member to operate;
• an operation amount detection means for detecting the operation amount of the volume variation member;
• a displacement control means for performing displacement control of the volume variation member by means of the operation means by resisting the urging force of the urging means when the liquid chemical intake port to the pump chamber is open, and thereafter, for closing the pump chamber and releasing the displacement control of the volume variation member by means of the operation means;
• and
• a determination means for determining the presence or absence of gas inside the pump chamber based upon the operation amount detection results by the operation amount detection means, after displacement control of the volume variation member is released by the displacement control means.