US 2007/0177788 A1 · System and method for detecting wafer failure in wet bench applications

Abstract

A system is disclosed for detecting the presence of a broken or mis-positioned wafer during bench processing of the wafers. In one embodiment, a charge-coupled device (CCD) is provided above a wet bench bath, and is positioned to record an image of the bath and its contents. The CCD is connected to processing software that compares the image with a stored image of the bath. Based on the image comparison, the system can provide either a “go” indication, where the images are deemed substantially the same, or an “error” indication, where the images are deemed substantially different thus indicating the presence of broken wafer pieces in the bath. In a second embodiment, the CCD may be positioned to record an image of a plurality of wafers carried on a cassette-less wafer lifter held above the bath. Again, the CCD may be connected to processing software that compares the image with a stored image of the plurality of wafers on the lifter. Based on the image comparison, the system can provide a “go” indication if the images are substantially the same, or an “error” indication if the images are substantially different—indicating the presence of a broken or mis-positioned wafer on the wafer lifter. A method of using the system is also disclosed.

Claims19

Dependent claims

A system for detecting a wafer, comprising:

a process tank;
an image detection device positioned adjacent said process tank, said imaging device configured to obtain a first set of image data representing an internal portion of said process tank;
and
an image processing device connected to said image detection device for receiving said first set of image data from said image detection device;
wherein said image processing device is capable of comparing said first set of image data to said first set of stored data to indicate the presence of a first conforming condition when the difference between the first set of image data and the first set of stored data is within a first predetermined range, and to indicate the presence of a first nonconforming condition when the difference between the first set of image data and the first set of stored data is outside said first predetermined range.

2 more elements

Dependencies are inferred from the claim text.

System and method for detecting wafer failure in wet bench applications

Life of this patent

System and method for detecting wafer failure in wet bench applications

Life of this patent

Abstract

Claims19