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AssigneeFanuc Corporation
InventorsYoshitaka Kubo, Toshiyasu Shiomi, Akira Egawa, Kazuhiro Suzuki
Estimating the term…
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.
A gas laser oscillator comprising a gas chamber for containing laser gas, a supply-side valve for regulating a supply of the laser gas to said gas chamber, an exhaust-side valve for regulating an exhaust of the laser gas from said gas chamber, and a gas pressure measuring device for measuring pressure in said gas chamber, said laser gas in said gas chamber being replaced while controlling said supply-side valve and said exhaust-side valve during the time of generating a laser light by exciting the laser gas in said gas chamber,
A method of measuring a laser gas replacement amount per unit time during a laser oscillating operation in a gas laser oscillator in which a laser gas in a gas chamber is replaced while controlling a supply of the laser gas to said gas chamber and an exhaust of the laser gas from said gas chamber during the time of generating a laser light by exciting the laser gas in said gas chamber, said method characterized by comprising the steps of:
A method of measuring a laser gas replacement amount per unit time during a laser oscillating operation in a gas laser oscillator in which a laser gas in a gas chamber is replaced while controlling a supply of the laser gas to said gas chamber and an exhaust of the laser gas from said gas chamber during the time of generating a laser light by exciting the laser gas in said gas chamber, said method characterized by comprising the steps of:
Dependencies are inferred from the claim text.