US 2007/0177301 A1 · Method to make a perpendicular magnetic recording head with a side write shield

Abstract

A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.

Claims20

Dependent claims

A PMR head having a three-way side shielded pole comprising:

a substrate;
a pair of laterally disposed and separated side shields formed on said substrate, the shields having coplanar ABS front surfaces and transverse, facing, sloping side surfaces, the separation between said side surfaces forming a uniform transverse trench having a truncated wedge-shaped cross-sectional shape in the ABS plane and, thereby, forming a similarly shaped opening at said ABS plane, said wedge being widest at the upper shield layer surface;
a magnetic pole formed over said substrate, said pole having a pole tip formed within said transverse trench and being, therefore, of similar cross-sectional shape as said trench and said pole tip being centrally aligned within said trench and terminating at said ABS surface;
an insulating side gap layer formed about lateral and lower sides of said pole tip, separating said pole tip from said substrate and said side shields;
a horizontal, planar write gap layer formed over said pole tip and said side shields;
an upper shield formed over said write gap layer.

3 more elements

A method of fabricating a PMR head having a three-way side shielded pole comprising:

providing a substrate;
forming a pair of laterally disposed and separated, side shields on said substrate, said shields having coplanar ABS front surfaces and transverse, facing, sloping sidewall surfaces, the separation between said sidewall surfaces forming a transverse trench having a uniform truncated wedge-shaped cross-sectional shape and, thereby, forming a similarly shaped opening at said ABS plane;
then
forming a magnetic pole above said substrate, said pole being separated from said substrate and said side shields by an insulating side gap layer and said pole having a rear portion disposed behind said side shields and a pole tip portion formed within said trench and, therefore, of similar cross-sectional shape as said trench, said pole tip being centrally aligned within said trench and terminating at said ABS surface;
then
forming a horizontal, planar write gap layer over said pole tip and said side shields;
and then
forming an upper shield over said write gap layer.

5 more elements

Dependencies are inferred from the claim text.

Method to make a perpendicular magnetic recording head with a side write shield

Life of this patent

Method to make a perpendicular magnetic recording head with a side write shield

Life of this patent

Abstract

Claims20