Holding device and exposure apparatus using the same

Abstract

A holding device 100A according to one preferred form of the invention includes a holding member having holding portions 121 with an approximately V-shaped recess by which a subject member 110 having approximately V-shaped protrusions 111 is held, wherein the V-shaped protrusions 111 are disposed at a pitch of about 120 degrees with respect to the center of the subject member 110 and the holding portions 121 are disposed at positions to be opposed to the V-shaped protrusions, wherein the V-shaped protrusions 111 and the supporting portions 121 have supporting flat surfaces 112 and 112, and 114 and 124 which are opposed to and in parallel to each other, and wherein rolling members 131 are disposed between these parallel flat surfaces.

Dependencies are inferred from the claim text.