Optical element, and light source unit and exposure apparatus having the same
AssigneeCanon Kabushiki Kaisha
InventorsFumitaro MASAKI, Akira Miyake
Life of this patent
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Abstract
An optical element includes plural multilayer mirrors, wherein the multilayer mirrors are renewable.
Claims21
An optical element comprising plural multilayer mirrors, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable.
A light source unit comprising:
- a light source that generates light;
- and
- an optical element that includes plural multilayer mirrors, and condenses the light generated from said light source, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable.
An exposure apparatus comprising an optical element for introducing light from a light source to an object to be exposed, said optical element including plural multilayer mirrors, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable.
An exposure apparatus comprising:
- a light source unit that includes a light source that generates light, and an optical element that includes plural multilayer mirrors, and condenses the light generated from said light source, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable.
A device fabrication method comprising the steps of:
- exposing an object using an exposure apparatus;
- and
- performing a predetermined process for the object exposed,
- wherein the exposure apparatus includes an optical element for introducing light from a light source to the object, said optical element including plural multilayer mirrors, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable.
A device fabrication method comprising the steps of:
- exposing an object using an exposure apparatus;
- and
- performing a predetermined process for the object exposed,
- wherein the exposure apparatus includes:
- a light source unit that includes a light source that generates light, and an optical element that includes plural multilayer mirrors, and condenses the light generated from said light source, each of said multilayer mirrors include, in order from a surface thereof, a multilayer of alternating layers of differing optical materials, a protective layer, an aluminum release layer, and a ceramic glass substrate, wherein said multilayer mirrors are renewable;
- an illumination optical system that uses light from said light source unit to illuminate a reticle;
- and
- a projection optical system for projecting a pattern formed on the reticle onto the object.
Dependencies are inferred from the claim text.