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US 2007/0177247 A1Published application
Method and device for modulating light with multiple electrodes
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorMark Miles
Life of this patent
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Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
Claims44
1-10. (canceled)
An electronic device, the device comprising:
- a cavity at least partially defined by first and second layers, the cavity being configured to cause the electronic device to reflect a wavelength of light;
- and
- first and second electrodes coupled to the first layer and associated with the cavity, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first and second layers.
A display device, comprising:
- means for causing the display device to reflect a wavelength of light, the causing means at least partially defined at least two means for reflecting light;
- and
- first and second means for moving at least one of the at least two reflecting means, wherein the first and second moving means are coupled to one of the at least two reflecting means, and at least one of the first and second moving means is configured to cause a relative movement of the at least two reflecting means.
An interferometer device, comprising:
- first and second layers comprising first and second at least partially reflective surfaces, respectively, the first and second layers being movable with respect to one another, the first and second partially reflective surfaces being spaced apart by a cavity having a variable dimension, the cavity configured to cause the interferometric device to reflect a wavelength of light;
- and
- first and second electrodes coupled to the first partially reflective surface, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first and second layers.
A method of making a MEMS device, the method comprising:
- providing a substrate;
- forming a first layer on the substrate;
- coupling first and second electrodes to the first layer;
- forming a sacrificial layer on the first layer;
- forming a second layer on the sacrificial layer;
- and
- forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer.
4 more elements
Dependencies are inferred from the claim text.