Surface defect inspection apparatus, surface defect inspection method, and computer program product
OwnerTeruki Kamadainventor
Life of this patent
Estimating the term…
Abstract
A surface-defect inspection apparatus includes a line light source that irradiates a pattern light having brightness differentiated in a direction oblique to a sub-scanning direction of a rotating inspection target object; a line sensor that carries out a one-dimensional imaging of the inspection target object in a main scanning direction using an irradiated pattern light and reflected from the inspection target object; a phase detecting unit that detects a change of the phase of the brightness of a taken line image; and an control unit that controls the position of the line sensor to keep constant a relative distance between a position of the inspection target object and a position of the line sensor from a change of the phase.
Claims19
A surface-defect inspection apparatus comprising:
- an irradiating unit that irradiates a pattern light, having brightness or color changed in an inspection moving direction, to an inspection position of an inspection target object of which the inspection position is moved following a lapse of time;
- a one-dimensional imaging unit that carries out a one-dimensional imaging of the pattern light irradiated by the irradiating unit and reflected from the inspection position, to a direction crossing the inspection moving direction;
- a change detecting unit that detects a change of brightness or color from a one-dimensional image obtained by the one-dimensional imaging unit;
- and
- a control unit that controls a moving unit, which moves the inspection target object or the one-dimensional imaging unit, to keep constant a distance between the inspection position of the inspection target object and the one-dimensional imaging unit, based on a change of the brightness or color detected by the change detecting unit.
A surface-defect inspection method comprising:
- irradiating a pattern light, having brightness or color changed in an inspection moving direction, with an irradiating unit onto an inspection position of an inspection target object of which the inspection position is moved following a lapse of time;
- carrying out a one-dimensional imaging of the pattern light irradiated by the irradiating unit and reflected from the inspection position, to a direction crossing the inspection moving direction with a one-dimensional imaging unit;
- detecting a change of brightness or color from a one-dimensional image obtained by the one-dimensional imaging unit at the carrying;
- and
- controlling movement of the inspection target object or the one-dimensional imaging unit, to keep constant a distance between the inspection position of the inspection target object and the one-dimensional imaging unit, based on a change of the brightness or color detected at the detecting.
A computer program product that causes a computer to execute:
- irradiating a pattern light, having brightness or color changed in an inspection moving direction, with an irradiating unit onto an inspection position of an inspection target object of which the inspection position is moved following a lapse of time;
- carrying out a one-dimensional imaging of the pattern light irradiated by the irradiating unit and reflected from the inspection position, to a direction crossing the inspection moving direction with a one-dimensional imaging unit;
- detecting a change of brightness or color from a one-dimensional image obtained by the one-dimensional imaging unit at the carrying;
- and
- controlling movement of the inspection target object or the one-dimensional imaging unit, to keep constant a distance between the inspection position of the inspection target object and the one-dimensional imaging unit, based on a change of the brightness or color detected at the detecting.
Dependencies are inferred from the claim text.