Method and apparatus for manufacturing microstructure and device manufactured thereby
AssigneeSeiko Epson Corporation
InventorJun AMAKO
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a microstructure, includes: dividing an incident laser beam into a plurality of diffracted beams by means of a diffractive optical element; concentrating said divided plurality of diffracted beams into mutually parallel diffracted beams by means of a telecentric lens; causing each of said mutually parallel diffracted beams to enter perpendicularly to the plane into a collection of axicons comprised of a plurality of axicons arranged into an array in such a manner that the center of each diffracted beam and the center of each axicon coincide, thereby forming a plurality of arrayed Bessel beams; and irradiating said plurality of arrayed Bessel beams onto a machined body.
Claims5
A method for manufacturing a microstructure, comprising:
- dividing an incident laser beam into a plurality of diffracted beams by means of a diffractive optical element;
- concentrating the divided plurality of diffracted beams into mutually parallel diffracted beams by means of a telecentric lens;
- causing each of the mutually parallel diffracted beams to enter perpendicularly to a collection of axicons comprised of a plurality of axicons arranged in an array in such a manner that the center of each diffracted beam and the center of each axicon coincide, thereby forming a plurality of arrayed Bessel beams;
- and
- irradiating the plurality of arrayed Bessel beams onto a machined body.
An apparatus for manufacturing a microstructure, comprising:
- a diffractive optical element that divides an incident laser beam into a plurality of diffracted beams;
- a telecentric lens that concentrates the divided plurality of diffracted beams into mutually parallel diffracted beams;
- and
- a collection of axicons comprised of a plurality of axicons arranged into an array.
Dependencies are inferred from the claim text.