Ink jet recording head and manufacturing method thereof

A method of fabricating an ink jet recording head having:

• a substrate;
• a plurality of ink discharge ports formed to a front face side of the substrate and a plurality of ink flow paths communicating with the ink discharge ports;
• and a common ink supply opening extending through the substrate and communicating with the plurality of ink flow paths, the ink jet recording head being provided with a filter formed in an opening portion of the ink supply opening arranged in the front face side of the substrate, the filter being constituted of films having formed therein a plurality of fine opening portions,
• wherein when anisotropic etching is applied to the substrate from a rear face side thereof to form the ink supply opening, a sacrifice layer formed to a film preliminarily formed on the substrate, infilling the fine opening portions is dissolved in etching liquid, whereby the filter is formed simultaneously with the ink supply opening.

A method of fabricating an ink jet recording head having:

• a substrate;
• a plurality of ink discharge ports formed to a front face side of the substrate and a plurality of ink flow paths communicating with the ink discharge ports;
• and a common ink supply opening extending through the substrate and communicating with the plurality of ink flow paths, the ink jet recording head being provided with a filter formed in an opening portion of the ink supply opening arranged in the front face side of the substrate, the filter being constituted of films having formed therein a plurality of fine opening portions,
• oxidized wherein when a resin layer preliminarily formed to the front face side of the substrate and stacked on patterned films is removed, the filter is formed simultaneously with the ink flow path.