Inkjet printhead employing piezoelectric actuator and method of manufacturing the inkjet printhead
AssigneeSamsung Electronics Co., Ltd.
InventorsJae-woo Chung, Hwa-sun Lee, Ji-hoon Kim
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Abstract
A piezoelectric inkjet printhead includes a fluid path forming substrate having a pressure chamber, a piezoelectric actuator formed on the fluid path forming substrate to provide a drive force to the pressure chamber to eject ink, and a damping layer formed on the piezoelectric actuator to dampen a residual vibration of the piezoelectric actuator.
Claims31
A piezoelectric inkjet printhead, comprising:
- a fluid path forming substrate having a pressure chamber;
- a piezoelectric actuator formed on the fluid path forming substrate to provide a drive force to the pressure chamber to eject ink therefrom;
- and
- a damping layer formed on the piezoelectric actuator to dampen a residual vibration of the piezoelectric actuator.
A piezoelectric inkjet printhead, comprising:
- a fluid path forming substrate having a pressure chamber;
- a piezoelectric actuator to provide a drive force to the pressure chamber to eject ink;
- and
- a damping layer formed on the piezoelectric actuator, the damping layer having a mechanical loss rate that is larger than a mechanical loss rate of the piezoelectric actuator and a mechanical loss rate of the fluid path forming substrate.
A piezoelectric inkjet printhead, comprising:
- a substrate forming a pressure chamber;
- a piezoelectric actuator formed on a surface of the substrate to provide an ink ejecting pressure in the pressure chamber;
- and
- a predetermined material formed on the piezoelectric actuator to compensate for residual vibrations generated by an operation of the piezoelectric actuator.
The piezoelectric inkjet printhead of claim 24, wherein the substrate is a silicon wafer, and the insulating layer is a silicon oxide layer.
A method of manufacturing a piezoelectric inkjet printhead, comprising:
- forming a pressure chamber within a substrate;
- forming a piezoelectric actuator on a surface of the substrate corresponding to the pressure chamber to provide an ink ejecting pressure in the pressure chamber;
- and
- forming a predetermined material on the piezoelectric actuator to compensate for residual vibrations of the piezoelectric actuator.
A method of damping a residual vibration of a piezoelectric inkjet printhead having a substrate and a piezoelectric actuator, the method comprising:
- compensating for a residual vibration generated by the piezoelectric actuator using a predetermined material having an elastic coefficient that is smaller than an elastic coefficient of at least one of the piezoelectric actuator and the substrate.
Dependencies are inferred from the claim text.