Method and Apparatus for Pad Aligned Multiprobe Wafer Testing

A wafer prober for testing a plurality of semiconductor chips formed on a wafer, each chip having a plurality of bonding pads, each pad having a pad contact area, comprising:

• a probe card having at least two probes arranged such that said probes can simultaneously contact a respective at least two of said bonding pads;
• a first positioning means for changing, in response to a control signal, a relative position between said probe card and said wafer in directions normal to a face of said wafer, between a position at which said probes touch said bonding pads and a position at which said probes are separated from said bonding pads;
• a second positioning means for changing, in response to a control signal, the relative position between said probe card and said wafer, in directions parallel to said face;
• a means for determining, using a captured image of said wafer, a position of a probe needle scar formed on said bonding pads through contact of said at least two probes against said bonding pads;
• and
• a control unit having means for measuring electrical characteristics between pads contacted by said probes, and for generating a sequence of said control signal such that said first positioning means, said second positioning means for measuring carry out a succession of measurement cycles, and wherein said control unit identifies, from said means for determining, if a pad has been contacted by one of said at least two probes,
• wherein at least one of said measurement cycles comprises said first positioning separating said at least two probes of said probe card from said bonding pads,
• said second positioning means subsequently changing a positional relation between said probe card and said wafer to a position wherein at least one of said at least two probes is aligned above a contact location within the contact area of a target pad of said bonding pads, wherein said contact location is based on a starting predetermined standard location and an offset, wherein said offset is based, at least in part, on whether or not said means for determining identifies that said target pad has been previously contacted by any of said probes,
• said first positioning means subsequently bringing said at least two of said probes of said probe card into contact with said at least two predetermined pads of said bonding pads, including said at least one of said probes contacting said target pad at said contact location,
• said measuring means measuring electrical characteristics between designated pads of said bonding pads;
• and
• wherein said measuring means successively implements measuring operations multiple times in accordance with a setup pattern, the measuring operations being implemented under different conditions in which relative position between said probe card and said wafer is varied in directions parallel to a face of said wafer.