Electron-emitting device, electron source, image display apparatus, and their manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKeisuke Yamamoto, Tamaki Kobayashi
Life of this patent
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Abstract
In an electron-emitting device having a pair of electroconductors arranged on a substrate at an interval, a top of one electroconductor is higher than that of the other electroconductor and a groove extending from the interval region toward a position under a region where the one electroconductor is come into contact with the substrate is formed on the substrate. Deterioration of the electron-emitting device due to collision of charged particles is suppressed by the asymmetrical electron-emitting region, electron-emitting efficiency is improved, and a long life is realized.
Claims5
1-9. (canceled)
A manufacturing method of an electron-emitting device having a pair of electroconductive members arranged on a substrate with a gap and a film which contains carbon as a main component and covers each of said pair of electroconductive members, comprising the step of applying voltage pulses of both first and second polarities across said pair of electroconductive members arranged on said substrate with the gap in an atmosphere containing carbon compound gases, wherein in said voltage pulses of both first and second polarities, there is a sequence of time periods comprising a first voltage pulse period (T1) during which a voltage pulse of the first polarity is being applied, a first quiescent period (T2) until a voltage pulse of the second polarity is applied after applying the voltage pulse of the first polarity, a second voltage pulse period (T3) longer than the first voltage pulse period (T1) during which a voltage pulse of the second polarity is being applied, and a second quiescent period (T4) longer than the first quiescent period (T2) until a next voltage pulse of the first polarity is applied after applying the voltage pulse of the second polarity.
Dependencies are inferred from the claim text.