Back to results
US 2007/0176498 A1Published application
Ultrasonic wave generating device
AssigneeDenso Corporation
InventorsMakiko Sugiura, Takahiko Yoshida, Yasuyuki Okuda, Ryonosuke Tera, Hiroshi Tanaka, Yuta Hasebe
Life of this patent
Estimating the term…
Abstract
An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
Claims18
An ultrasonic wave generating device comprising:
- a substrate;
- a heat insulation layer on the substrate;
- a membrane heating portion on the heat insulation layer;
- and
- a membrane oscillator on the heating portion, wherein
- the heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator, and
- the oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
4 more elements
Dependencies are inferred from the claim text.