Semiconductor device having tin-based solder layer and method for manufacturing the same
AssigneeDenso Corporation
InventorsKimiharu Kayukawa, Akira Tanahashi, Chikage Noritake, Shoji Miura
Life of this patent
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Abstract
A semiconductor device includes: a semiconductor substrate; a base member; a tin-based solder layer; a first metal layer; and a first alloy layer. The semiconductor substrate is bonded to the base member through the first metal layer, the first alloy layer and the tin-based solder layer in this order. The first alloy layer is made of a first metal in the first metal layer and tin in the tin-based solder layer. The first metal layer is made of at least one of material selected from the group consisting of titanium, aluminum, iron, molybdenum, chromium, vanadium and iron-nickel-chromium alloy.
Claims14
1-13. (canceled)
A method for manufacturing a semiconductor device, which includes a semiconductor substrate and a base member bonded to the substrate with a tin-based solder layer, the method comprising the steps of:
- forming a first metal layer on the substrate;
- forming a second metal layer on the first metal layer;
- stacking the substrate on the base member through the solder layer, wherein the solder layer is disposed between the base member and the second metal layer;
- and
- heating the substrate with the base member so that the second metal layer is diffused into the solder layer and that the first metal layer and the solder layer are reacted to form a first alloy layer, wherein the first alloy layer is made of a first metal in the first metal layer and tin in the solder layer, wherein
- the first alloy layer is disposed between the first metal layer and the solder layer,
- the first metal layer is made of at least one of material selected from the group consisting of titanium, aluminum, iron, molybdenum, chromium, vanadium and iron-nickel-chromium alloy, and
- the second metal layer has an initial thickness in a range between 50 nm and 750 nm before the step of heating.
Dependencies are inferred from the claim text.