Manufacturing method of organic thin-film transistors and equipment for manufacturing the same
AssigneeHitachi, Ltd.
InventorsTomohiro Inoue, Akira Doi, Masahiko Ando
Life of this patent
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Abstract
To increase productivity of organic thin-film transistors, in an organic thin-film transistor manufacturing equipment, a liquid containing at least either one of a wiring material and a semiconductor material is coated on a substrate to form a number of organic thin-film transistors. Substrate carrying means carry the substrate. The substrate is heated by a first heating means, and the temperature of the substrate is controlled by a controller. The liquid containing at least either one of the wiring material and the semiconductor material is heated by a second heating means, and the temperature of this liquid is controlled also by the controller.
Claims9
An organic thin-film transistor manufacturing equipment which applies to coat a liquid containing at least either one of a wiring material and a semiconductor material on a substrate to form a number of organic thin-film transistors on the substrate,
- wherein a substrate carrying means that carries the substrate;
- a first heating means that heats the substrate;
- a substrate temperature controlling means that controls a temperature of the substrate heated by the first heating means;
- a second heating means that heats the liquid containing at least either one of the wiring material and the semiconductor material;
- and a liquid temperature controlling means that controls a temperature of the liquid heated by the second heating means are included.
An organic thin-film transistor manufacturing method comprising:
- a substrate carrying step of carrying a substrate to a predetermined position;
- and a liquid layer coating step of coating the substrate with a liquid containing at least either one of a wiring material and a semiconductor material to be performed after the substrate carrying step,
- wherein a temperature of the substrate is heated to a predetermined temperature in both the substrate carrying step and the liquid layer coating step.
Dependencies are inferred from the claim text.