Thin-film capacitor and method of manufacturing the same

A manufacturing method of a thin-film capacitor, comprising the steps of:

• forming a thin-film capacitor element having two conductive films and a dielectric film sandwiched therebetween above a substrate;
• forming an inorganic protective film covering said thin-film capacitor element;
• forming an organic protective film covering said thin-film capacitor element from above said inorganic protective film;
• forming a first opening in said organic protective film;
• forming a second opening at such a portion of said inorganic protective film that is exposed from said first opening, said second opening exposing at least a part of said conductive film and being smaller than said first opening;
• and
• forming a bump to be connected with the conductive film via said first and second openings.