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AssigneeBundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt
InventorsIngolf Weingaertner, Clemens Elster, Michael Schulz
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The invention relates to a measuring arrangement comprising a sensor head (13) that can be displaced over a surface (11) at a distance therefrom in a scanning direction (R), a plurality of distance sensors which are suitable for distance measurement and are interspaced in the scanning direction in a fixed manner, a displacement device for displacing the sensor head (13) in such a way that points of the surface (11) are detected in successive scanning steps carried out by a plurality of distance sensors, and an evaluation device to which the output signals of the distance sensors are supplied. According to the invention, one such measuring arrangement is improved by an angle measuring device (14, 15) for determining an angle value of the sensor head (13) in relation to the scanning direction (R), and for forwarding said angle value to the evaluation device. In this way, systematic measuring errors can be eliminated for the reconstruction of a topography of the surface (11) in the scanning direction (R). Furthermore, the sensor head (13) can be calibrated by means of the measuring arrangement.
A measuring arrangement having a sensor head (13) which can be moved over a surface (11) , at a distance from the latter, in a scanning direction (R) and has a plurality of distance sensors which are suitable for measuring the distance and are at a fixed distance from one another in the scanning direction, having a movement device for moving the sensor head (13) in such scanning steps that points of the surface (11) are detected in successive scanning steps by a plurality of distance sensors, and having an evaluation device which can be supplied with the output signals from the distance sensors, characterized by an angle measurement device (14, 15) for determining an angle value of the sensor head (13) relative to the scanning direction (R) and for forwarding the angle value to the evaluation device.
A method for determining the topography of a surface (11) by scanning the surface (11) in a scanning direction (R) using a sensor head (13) which has a plurality of M (M>3) distance sensors which are at a distance from one another in the scanning direction, determining output signals from the distance sensors in prescribed scanning steps and evaluating the output signals in order to reconstruct the topography along the scanning direction (R), characterized in that the angle of the sensor head (13) relative to the scanning direction (R) is determined for each scanning step, and in that the angle value measured is incorporated in the evaluation for eliminating systematic measurement errors.
Dependencies are inferred from the claim text.