Ion implanter having a superconducting magnet
AssigneeAxcelis Technologies, Inc.
InventorsLeonard Rubin, John Poate
Life of this patent
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Abstract
An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece, such as a silicon wafer is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. Various magnets located along the beamline are provided for manipulating the ion beam and ions. Ion beam implanters having magnets including superconducting magnet coils are disclosed.
Claims28
An ion beam implanter comprising:
- a) an ion source for generating an ion beam;
- b) an implantation chamber having an evacuated interior region wherein a workpiece is positioned to intersect the ion beam;
- and
- c) a magnet positioned along a path between said ion source and said implantation chamber, said magnet including
- i) a core material and
- ii) a superconducting coil material positioned relative to said core material which, when energized creates a magnetic field for bending the ions in the ion beam away from an initial trajectory at which they enter the magnet.
A mass analysis magnet for use in an ion beam implanter, the magnet having a core comprising a ferromagnetic core material and a superconducting coil for setting up a magnetic field for selectively deflecting the ion beam from its original trajectory.
A scanning magnet for use in an ion beam implanter, the magnet having a core comprising a ferromagnetic core material and a superconducting coil for setting up a magnetic field to scan the ion beam in an oscillatory manner.
A parallelizing magnet for use in an ion beam implanter, the magnet having a core comprising a metal material and a superconducting material for setting up a magnetic field to bend ions in the ion beam by varying amounts so that they exit the parallelizing magnet moving along generally parallel beam paths.
An angular deflection magnet for use in an ion beam implanter, the magnet having a core comprising a metal material and a superconducting material for setting up a magnetic field for deflecting the ion beam in a direction transverse to a scan plane thereof.
An ion implantation system comprising:
- a) an ion source adapted to produce an ion beam along a path for treating a workpiece;
- b) an implantation region spaced from said ion source having an interior region for positioning a workpiece at a location for treatment from said ion beam;
- and
- c) a beam guide located between said ion source and said implantation region comprising a magnet having a core material and electromagnetic field generating coils wound about said core material that when energized parallelizes said ion beam, forming a plurality of substantially parallel ion beam paths for treating a workpiece, wherein said electromagnetic field generating coils are made from superconducting materials.
A method for ion implantation comprising:
- a) providing an ion source for generating an ion beam along a first trajectory;
- b) orienting a workpiece at a target location of said ion beam within an implantation region;
- and
- c) changing the characteristics of said ion beam to form a second trajectory by directing said ion beam through a magnet having electromagnetic coils made from superconducting material.
A method for controlling an ion beam during the implanting of a workpiece comprising the steps of:
- a) directing a beam of ions to move along an initial trajectory;
- b) causing the beam of ions from the initial trajectory to bend to a second trajectory by passing the beam through an analyzing magnet;
- c) focusing the beam of ions by directing the second trajectory through a lens;
- d) passing the beam of ions from the second trajectory through a deflecting magnet that when energized causes the beam of ions to scan in a back and forth manner creating a ribbon shaped ion beam;
- e) generating a substantially parallel beam path in said ribbon shaped ion beam by directing the ribbon shaped ion beam through a parallelizing magnet;
- and
- f) producing a controlled magnetic field in a region by using a superconducting magnet in any of said analyzing, deflecting, and parallelizing magnets, wherein said superconducting magnet includes a core surrounded by electromagnetic field generating coils made with superconducting materials.
An ion beam implantation system having superconducting magnets for steering the ion beam, the system comprising:
- a) an ion source for generating an ion beam from a plasma chamber;
- b) an analyzing superconducting magnet for modifying the beam to have a prescribed charge to mass ratio;
- c) a defecting superconducting magnet for causing the beam to repetitively scan side to side at a prescribed frequency range;
- d) a parallelizing superconducting magnet for ensuring that the beam is substantially parallel across a workpiece surface;
- and
- e) an implantation chamber positioned along the beam path subsequent to the superconducting magnets for implanting ions on a workpiece surface, said superconducting magnets comprising:
- i) a core made from a plurality of magnet laminations;
- ii) a plurality of coils made from superconducting materials;
- iii) a current source for energizing the superconducting magnets;
- and
- iv) a cooling system for cooling the superconducting magnets and maintaining said coils' superconducting materials at a superconducting temperature
- f) wherein the superconducting magnet maintains the current through the superconducting coil within predetermined ranges for analyzing, deflecting, or parallelizing the ion beam upon a workpiece.
Dependencies are inferred from the claim text.