Multi-spectral uncooled microbolometer detectors
AssigneeBAE Systems Information and Electronic Systems Integration Inc.
InventorsJeannie Geneczko, Richard Blackwell, Margaret Kohin
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Abstract
A process and system for a medium wave infrared (MWIR) uncooled microbolometer focal plane array (FPA). One embodiment is for a single MWIR band uncooled IR detector, wherein the design and fabrication utilizes standard silicon processing techniques reducing manufacturing costs and preserving existing manufacturing capabilities. Another embodiment is a two color uncooled microbolometer IR detector providing broadband detection.
Claims20
A multi-band infrared imaging device, comprising:
- An uncooled microbolometer focal plane array comprising a plurality of pixels, each of said pixels further comprising at least one structure layer, a detector layer and a medium wave absorber layer, and wherein each said pixel simultaneously detects at least two IR bands.
An optical stack for an uncooled microbolometer device, comprising:
- a read out integrated circuit (ROIC) substrate;
- a reflector on a surface of said substrate;
- a plurality of layers fabricated by LWIR processing, wherein said plurality of layers include an MWIR absorber, a detector, and at least one structure layer providing support and/or isolation;
- a gap between said reflector and said plurality of layers;
- and
- wherein said stack is part of said uncooled microbolometer and detects at least medium wave radiation.
A multi-spectral infrared (IR) focal plane array, comprising:
- an uncooled microbolometer detecting at least two infrared bands, said microbolometer comprising;
- a generally planar read out integrated circuit substrate base;
- at least one generally planar microbridge disposed approximately parallel to said base and separated by a gap;
- and
- wherein each said microbridge comprises a plurality of layers, said layers comprising at least one structural support layer, a detector layer, and selectively a medium wave absorber layer.
Dependencies are inferred from the claim text.