Method and device for observing a specimen in a field of view of an electron microscope
AssigneeHitachi, Ltd.
InventorsHiromi Inada, Isao Nagaoki, Hiroyuki Kobayashi
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Abstract
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.
Claims2
A method of observing a specimen in a field of view of an electron microscope comprising the acts of:
- setting the magnification of said electron microscope;
- setting conditions for moving said field of view;
- setting a starting position for said field of view;
- moving said field of view based upon said condition;
- illuminating said specimen with an electron beam having a first angle and forming a first transmission image of said specimen in said field of view;
- adjusting said electron beam to a second angle and forming a second transmission image of said specimen in said field of view;
- and
- calculating a degree of coincidence between said first and second transmission images.
2-36. (canceled)
Dependencies are inferred from the claim text.