Compensating for field imperfections in linear ion processing apparatus
AssigneeVarian, Inc.
InventorGregory Wells
Life of this patent
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Abstract
An electrode structure for manipulating ions includes a main electrode and a compensation electrode. An outer surface of the main electrode includes a curved section that includes an apex. An aperture is generally disposed at the apex and extends along a radial center line from the outer surface through a thickness of the main electrode. The compensation electrode is disposed at the radial center line and at a tangent line tangent to the apex. Another electrode structure includes a plurality of main electrodes defining an interior space, and one or more compensation electrodes disposed in the interior space. RF signals may be applied to the main electrodes and to the compensation electrode.
Claims27
An electrode structure for manipulating ions, comprising:
- a main electrode including a first axial end, a second axial end, and an outer surface axially extending from the first axial end to the second axial end along an axial dimension, the outer surface including a curved section, the curved section including an apex extending from the first axial end to the second axial end, and the main electrode having an aperture generally disposed at the apex and extending along a radial center line from the outer surface through a thickness of the main electrode;
- and
- a compensation electrode disposed at the radial center line of the aperture and at a tangent line tangent to the apex.
An electrode structure for manipulating ions, comprising:
- a plurality of main electrodes coaxially disposed about a central axis, each main electrode having an axial length extending generally in the direction of the central axis, each main electrode including an inside surface generally facing an interior space of the electrode structure, at least one of the main electrodes having an aperture radially extending from the inside surface through a thickness of the at least one main electrode;
- and
- a compensation electrode disposed in the interior space entirely outside of the aperture.
A method for compensating for an imperfection in an RF field active in a linear electrode structure, the electrode structure including a plurality of main electrodes coaxially disposed about a central axis, each main electrode having an axial length extending generally in the direction of the central axis, each main electrode including an inside surface generally facing an interior space of the electrode structure, at least one of the main electrodes having an aperture radially extending from the inside surface through a thickness of the at least one main electrode, the method comprising the step of applying one or more RF signals to the main electrodes and to a compensation electrode disposed in the interior space entirely outside of the aperture to generate a compensated RF field in the interior space.
Dependencies are inferred from the claim text.