Apparatus for detecting particles

Abstract

The invention relates to an apparatus for detecting particles, comprising a support element (1) and a plurality of electrically conductive structures (2) arranged on the support element (1), wherein the structures (2) are electrically insulated from each other and wherein each of the structures (2) can be electrically connected to an electronic read-out device, wherein an angle of incidence (α) is given between a beam direction of the particles and the support element (1), wherein a trough (3) is in each case arranged between a first structure (2) and a structure (2) adjacent to the first structure in the beam direction, wherein there is an at least partial overlap of the first structure (2) and the adjacent structure (2) in the beam direction.

Dependencies are inferred from the claim text.