Low Cost High Throughput Processing Platform

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement, said process chamber arrangement using at least two side-by-side, first and second process stations each of which is configured for executing a treatment process on one of the workpieces located at each of the first and second process stations such that two workpieces can simultaneously be exposed to the treatment process, a method comprising:

• arranging a workpiece support arrangement, separate from said process chamber arrangement, for supporting at least two of said workpieces at least generally in a stacked relationship to form a workpiece column;
• and
• supporting a workpiece transfer arrangement, separate from said process chamber arrangement, for transporting at least two of the workpieces between the workpiece column and the process chamber arrangement by simultaneously moving the two workpieces at least generally along first and second transfer paths, respectively, that are defined between said workpiece column and the first and second process stations.

58-61. (canceled)

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement, said process chamber arrangement using at least two side-by-side process stations each of which is configured for treating individual ones of the workpieces located at each of the process stations such that at least two workpieces can simultaneously be treated, a method comprising:

• forming a workpiece column using a workpiece support arrangement, separate from said process chamber arrangement, for supporting at least two of said workpieces at least generally in a stacked relationship;
• and
• simultaneously moving two pre-treatment ones of the workpieces from said workpiece column to each of the side-by-side process stations using a workpiece transfer arrangement that is separate from said process chamber arrangement.

66-71. (canceled)

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement that is configured for executing a treatment process on at least one of the workpieces, an apparatus comprising:

• a swing arm arrangement, forming part of said system, including at least a first swing arm for providing pivotal rotation of at least one workpiece about an axis of rotation, as part of transporting the workpiece at least in relation to the process chamber arrangement, and for moving in a direction that is at least generally along said axis of rotation, as another part of transporting the workpiece, to change an elevation of the swing arm such that the workpiece being transported can be moved between different spaced-apart elevational planes in addition to said pivotal rotation.

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement that is configured for executing a treatment process on at least one of the workpieces, a method comprising:

• pivotally rotating at least one workpiece about an axis of rotation, as part of transporting the workpiece in relation to said process chamber arrangement using a swing arm arrangement;
• and
• moving said swing arm arrangement in a direction that is at least generally along said axis of rotation, as another part of transporting the workpiece, to change an elevation of the swing arm such that the workpiece being transported can be moved between different spaced-apart elevational planes in addition to said pivotal rotation.

80-83. (canceled)

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement, said process chamber arrangement using at least one process station that is configured for executing a treatment process on at least one of the workpieces, a method comprising:

• positioning a workpiece support arrangement in one spaced apart relationship from said process chamber arrangement for supporting at least one of said workpieces;
• and
• supporting a swing arm arrangement in another spaced apart relationship from said process chamber arrangement including at least a first swing arm and a second swing arm configured for coaxial rotation about a common axis of rotation for use in transporting the workpieces between the workpiece support arrangement and the process chamber arrangement.

In a workpiece processing system in which a plurality of workpieces are movable to and from a process chamber arrangement, said process chamber arrangement using at least one process station that is configured for executing a treatment process on at least one of the workpieces, a method comprising:

• supporting a swing arm arrangement, as part of said system, including at least a first swing arm and a second swing arm configured for coaxial rotation about a common axis of rotation for use in transporting the workpieces in relation to said process chamber arrangement.

88-93. (canceled)

104-116. (canceled)

For use in a workpiece processing system for processing workpieces, said system having at least two adjacent chambers with a slot defined therebetween, through which slot said workpieces are transportable and a chamber sealing surface, that is at least generally planar, surrounding said slot and supporting a sealing arrangement surrounding said slot, a method for selectively opening and closing said slot, said method comprising:

• providing a sealing blade member including a blade surface that is configured for sealingly engaging said sealing arrangement;
• and
• configuring an actuator arrangement for moving said sealing blade member between an open position, away from the slot, to provide for passage of said workpieces therethrough, and a closed position in which the sealing blade member is brought into sealing contact at least with the sealing arrangement and for supporting the sealing blade member in a way which provides for movement of the blade surface, at least responsive to engagement with the sealing arrangement, that is characterized by two degrees of freedom for aligning the blade surface to the sealing arrangement and, thereby, the sealing surface.

124-127. (canceled)