Potentiometric pCO2 Sensor and the Fabrication Method thereof

A method for fabricating a potentiometric pCO2 sensor, comprising:

• depositing a solid ion-sensing layer on a substrate;
• connecting a conducting wire to said solid ion-sensing layer;
• performing a sealing process to form a sealing layer provided to enclose the peripheral of said substrate and said solid ion-sensing layer and cover the top of said substrate and said solid ion-sensing layer wherein said sealing layer has a window to expose part of said solid ion-sensing layer;
• forming a solid electrolyte layer on said solid ion-sensing layer;
• and
• forming a gas-permeable layer on said solid electrolyte layer;
• wherein said gas-permeable layer allows air molecules to diffuse through, the pH value of said solid electrolyte layer changes in response to the CO2 concentration in the diffusing air molecules, said solid ion-sensing layer senses the pH change of said solid electrolyte layer to generate a sensing signal, and the sensing signal is outputted by said conducting wire.