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US 2007/0175588 A1Published application
High throughput plasma treatment system
AssigneeNordson Corporation
InventorsLouis Rigali, David Hoffman, Keda Wang, William Smith
Life of this patent
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Abstract
System and method for the plasma treatment of parts. The system and method involve energizing horizontal and vertical electrodes within a treatment chamber to generate a plasma used to treat the parts.
Claims10
1-27. (canceled)
A system for plasma treating a plurality of parts, the system comprising:
- a treatment chamber;
- a first horizontal electrode within said treatment chamber;
- a second horizontal electrode within said treatment chamber, said second horizontal electrode spaced vertically relative to said first horizontal electrode such that the plurality of parts are between said first and second horizontal electrodes;
- at least one vertical electrode electrically coupled to one of said first and second horizontal electrodes at a location adjacent to the plurality of parts;
- and
- a plasma-generating device operable to produce a plasma within said treatment chamber for treating the plurality of parts, said plasma generating device electrically connected to at least one of said first horizontal electrode or said second horizontal electrode.
3 more elements
A method for the plasma treatment of a plurality of parts in a system including a treatment chamber, a magazine holding the plurality of parts, and a horizontal electrode and a vertical electrode mounted in the treatment chamber, the method comprising:
- loading the magazine into the treatment chamber at a position within the treatment chamber adjacent the horizontal and vertical electrodes;
- energizing the vertical and horizontal electrodes to generate a plasma within the treatment chamber;
- treating the plurality of parts with the plasma;
- and
- unloading the magazine and plasma-treated parts from the treatment chamber.
2 more elements
Dependencies are inferred from the claim text.