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US 2007/0175396 A1Published application
Film-forming apparatus
OwnerShigeru Kasai, Takashi Kakegawainventors
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Abstract
A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.
Claims32
A film-forming apparatus comprising:
- a processing container that defines a chamber,
- a stage arranged in the chamber, on which a substrate to be processed can be placed,
- a showerhead provided opposite to the stage, which has a large number of gas-discharging holes,
- a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and
- a showerhead-temperature controlling unit that controls a temperature of the showerhead, wherein
- an infilling member and a fixing member for fixing the infilling member to the showerhead or the processing container are arranged between the showerhead and the processing container.
3 more elements
2-19. (canceled)
A Ti-film-forming apparatus comprising:
- a processing container that defines a chamber,
- a stage arranged in the chamber, on which a substrate to be processed can be placed,
- a showerhead provided opposite to the stage, which has a large number of gas-discharging holes,
- a gas-supplying mechanism that supplies a Ti-including gas and a reduction gas into the chamber through the showerhead,
- a showerhead-temperature controlling unit that controls a temperature of the showerhead, and
- a plasma-generating unit for generating plasma of the Ti-including gas and the reduction gas in the chamber,
- wherein
- an infilling member and a fixing member for fixing the infilling member to the showerhead or the processing container are arranged between the showerhead and the processing container.
5 more elements
Dependencies are inferred from the claim text.