Nanoscale pyrogenic oxides
OwnerAndreas Gutsch, Thomas Hennig +4inventors
InventorsAndreas Gutsch, Thomas Hennig, Stipan Katusic, Michael Kramer, Gunther Michael, Geoffrey Varga
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Abstract
Nanoscale, pyrogenically produced oxides and/or mixed oxides having a BET surface area of between 1 m2/g and 600 m2/g and a chloride content of less than 0.05 wt. % are produced by converting organometallic and/or organometalloid substances into the oxides at temperatures of above 200° C. The oxides may be used as a polishing agent in the electronics industry (CMP).
Claims12
(canceled)
A process for the production of nanoscale, pyrogenically produced oxides and/or mixed oxides of metals and/or metalloids having a BET surface area of between 1 m2/g and 600 m2/g and a total chloride content of less than 0.05 wt. %, wherein organometallic and/or organometalloid substances, optionally dissolved in a solvent, are converted into the oxides, optionally in a flame, at temperatures of above 200° C.
A use of the nanoscale, pyrogenically produced oxides and/or mixed oxides of metals and/or metalloids as a filler, as a support material, as a catalytically active substance, as a starting material for the production of dispersions, as a polishing material for polishing metal or silicon wafers in the electronics industry (CMP), as a basic substance in ceramics, in the cosmetics industry, as an additive in the silicone and rubber industry, for establishing the rheological properties of liquid systems, for providing thermal stabilisation, in the coatings industry as a thermal insulating material, as an antiblocking agent.
A pyrogenically produced monoclinic zirconium oxide a chloride content of less than 0.05 wt. %.
A pyrogenically produced amorphous aluminium oxide.
A pyrogenically produced alpha aluminium oxide.
A pyrogenically produced titanium oxide having a rutile structure.
Dependencies are inferred from the claim text.