Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed

Abstract

The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed. More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion-resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrates, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.

Dependencies are inferred from the claim text.