Manufacturing process control methods and systems
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJu-Kau Chen, Meng-Chao Huang, Rebecca Hsu, Chih-Jen Pan, Amy Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJu-Kau Chen, Meng-Chao Huang, Rebecca Hsu, Chih-Jen Pan, Amy Chen
Estimating the term…
A manufacturing process control system comprises a process controller and an order manager coupled to a network. When receiving an order for a batch of lots requiring a manufacturing process by a manufacturing entity, the order manager automatically provides an electronic list comprising entries corresponding to stages of the manufacturing process, at which processing of the lots can be held. When order manager receives designation of a first entry on the list through the network, the process controller monitors the lots while the lots are being processed in the manufacturing entity, and automatically directs at least one lot to be held before processing thereof at a stage to which the first entry corresponds.
A manufacturing process control system, comprising:
A manufacturing process control method, implemented in a manufacture process control system comprising an order manager coupled to a network and a process controller coupled to the order manager, comprising:
A manufacturing process control system, comprising:
Dependencies are inferred from the claim text.