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US 2007/0167126 A1Published application
Air handling system for clean room
OwnerRay Ghattasinventor
Life of this patent
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Abstract
A clean room air handling system is disclosed. The system includes an air handler adapted to receive an air flow, the air handler further provided with a cooling apparatus, and at least one supply fan for generating the air flow without a cooling apparatus directly associated therewith, and modulation means for operating said system.
Claims16
An air handling system for a clean room, comprising:
- at least one air handler adapted to provide an air flow;
- a cooling unit associated with the air handler;
- at least one supply fan for generating the air flow, the supply fan disassociated from the air handler, for flowing the conditioned air through the system to the clean room;
- modulation means for operating said system.
1 more element
A method of operating a clean room, comprising the steps of:
- providing a conditioned airflow source from an air handler;
- flowing the conditioned airflow via a supply fan to a controlled environment;
- and
- controlling the conditioned airflow.
1 more element
A clean room, comprising:
- a ceiling portion, a floor portion, and wall portions defining a controlled environment, at least one portion having a plenum;
- an air handling system having at least one air handler adapted to receive an air flow to be directed through said plenum into said clean room, said air handler including an airflow cooling apparatus;
- at least one supply fan for generating the air flow, said supply fan disassociated from the air handler;
- modulation means for operating said system.
1 more element
Dependencies are inferred from the claim text.