Apparatus for producing an organic EL display device, and process for producing an organic EL display device, using the same

A process for producing an organic electroluminescence display device comprising a lower electrode, an organic luminescence medium, and an upper electrode, the periphery of the device being sealed with a sealing member, the process comprising the steps of:

• carrying a supporting substrate into a first unit;
• transferring the carried-in supporting substrate from the first unit to a second unit by using a carrying device;
• heating the transferred supporting substrate in the second unit to conduct a dehydrating treatment;
• transferring the dehydrated supporting substrate from the second unit to a third unit by using a carrying device;
• forming the organic luminescence medium and the upper electrode by a vapor depositing device, a sputtering device, an ion plating device, an electron beam evaporation device, a chemical vapor deposition device, a metal oxide chemical vapor deposition device or a plasma enhanced chemical vapor deposition device in the third unit;
• transferring the supporting substrate on which the organic luminescence medium and the upper electrode are formed from the third unit to a fourth unit by using a carrying device;
• and
• sealing the periphery of the organic electroluminescene display device with the sealing member in the fourth unit.

A process for producing an organic electroluminescence display device comprising a lower electrode, an organic luminescence medium, and an upper electrode, the periphery of the device being sealed with a sealing member, the process comprising the steps of:

• carrying a supporting substrate into a first unit;
• transferring the carried-in supporting substrate from the first unit to a second unit by using a carrying device;
• heating the transferred supporting substrate in the second unit to conduct a dehydrating treatment;
• transferring the dehydrated supporting substrate from the second unit to a third unit by using a carrying device;
• forming the organic luminescence medium and the upper electrode by a vapor depositing device, a sputtering device, an ion plating device, an electron beam evaporation device, a chemical vapor deposition device, a metal oxide chemical vapor deposition device, or a plasma enhanced chemical vapor deposition device in the third unit;
• transferring the supporting substrate on which the organic luminescence medium and the upper electrode are formed from the third unit to the second unit through the first unit by using a carrying device;
• and
• sealing the periphery of the organic electroluminescence display device with the sealing member in the second unit.