Method of manufacturing vertical inorganic alignment layer and liquid crystal display having the vertical inorganic alignment layer
OwnerSoon-Joon Rho, Duck-Jong Suhinventors
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OwnerSoon-Joon Rho, Duck-Jong Suhinventors
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In a method of manufacturing a vertical inorganic alignment layer and a liquid crystal display having the vertical inorganic alignment layer, a plasma power is applied to a plasma generating member attached to an outside of a reactor. When a process substrate to which a back-bias voltage and heat are applied is loaded into the reactor, a reaction gas is injected into the reactor. Then, when a frequency of the plasma power is controlled, the vertical inorganic alignment layer having a resistivity of about 1010 ohms-cm to about 1015 ohms-cm and a vertical aligning property is formed on the process substrate. Thus, the liquid crystal display may prevent deterioration of display quality thereof due to an electrostatic field.
A method of manufacturing a vertical inorganic alignment layer, comprising:
A method of manufacturing a vertical inorganic alignment layer, comprising:
A method of manufacturing a liquid crystal display, comprising:
A liquid crystal display comprising:
Dependencies are inferred from the claim text.