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US 2007/0166838 A1Published application
Method for patterning a ferroelectric polymer layer
AssigneeKoninklijke Philips Electronics N.V.
InventorsAlbert Marsman, Nicolaas Willard
Life of this patent
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Abstract
Ferroelectric polymers such as for example copolymers of vinylidenedifluoride (VDF) and trifluoroethylene (TrFE) may be patterned by spincoating the ferroelectric polymer layer from a ferroelectric spincoating solution, which comprises a photosensitive crosslinker, onto a substrate followed by irradiating the ferroelectric polymer layer through a mask and removing the unexposed parts of the ferroelectric polymer layer.
Claims13
A method for patterning a ferroelectric polymer or oligomer layer comprising the steps of:
- providing a ferroelectric polymer or oligomer composition having a crosslinking agent,
- applying the ferroelectric polymer or oligomer composition to a substrate to form a ferroelectric polymer or oligomer layer on the substrate,
- selectively crosslinking a part of said ferroelectric polymer or oligomer layer, and
- removing uncrosslinked parts of said ferroelectric polymer or oligomer layer.
1 more element
An electronic device comprising a patterned crosslinked ferroelectric layer.
Dependencies are inferred from the claim text.