Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium
AssigneeTDK Corporation
InventorsMinoru Fujita, Mikiharu Hibi
Life of this patent
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Abstract
A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.
Claims18
A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in an outer edge area of the stamper toward an outer edge side of the outer edge area.
A stamper that has a center hole formed in a center thereof and is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a rim area of the center hole toward a rim side of the rim area.
A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in at least one of a first area, which is located on an outer edge side of a predetermined area located between an outer edge and a center of the stamper, and a second area, which is located on a center side of the predetermined area, as a distance from a middle position in a radial direction of the predetermined area increases.
A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in an outer edge area of the stamper toward a center of the stamper.
A stamper that has a center hole formed in a center thereof and is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a rim area of the center hole toward an outer edge side of the rim area.
A stamper formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in at least one of a first area, which is located on an outer edge side of a predetermined area located between an outer edge and a center of the stamper, and a second area, which is located on a center side of the predetermined area, toward a middle position in a radial direction of the predetermined area.
Dependencies are inferred from the claim text.