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US 2007/0166630 A1Published application
Photomasks including multi-layered light-shielding and methods of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsChang-Hwan Kim, Suk-Ho Lee, Young-Soo An
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Abstract
Example embodiments may provide photomasks including multi-layered light-shielding, and methods of manufacturing the same. An example embodiment may include a transparent substrate, and a multi-layered light-shielding layer having non-transparent and transparent layers alternately laminated on the transparent substrate.
Claims28
A photomask comprising:
- a transparent substrate;
- and
- a multi-layered light-shielding layer having non-transparent layers and transparent layers alternately laminated on the transparent substrate.
A method of manufacturing a photomask, the method comprising:
- laminating non-transparent layers and transparent layers alternately on a transparent substrate to form a light-shielding layer;
- forming a photosensitive film on the light-shielding layer;
- patterning the photosensitive film so as to form photosensitive film patterns;
- patterning the light-shielding layer using the photosensitive film patterns as an etching mask so as to form light-shielding patterns;
- and
- removing the photosensitive film patterns.
3 more elements
Dependencies are inferred from the claim text.