Method of fabricating thin film battery with annealed substrate
OwnerVictor Krasnov, Kai-Wei Nieh +1inventors
InventorsVictor Krasnov, Kai-Wei Nieh, Su-Jen Ting
Life of this patent
Estimating the term…
Abstract
A thin film battery manufacturing method comprises annealing a battery substrate to a temperature at which organic materials are burned off the battery substrate to clean the battery substrate. The battery substrate comprises a thickness of less than about 100 microns. After annealing, a plurality of thin films are formed on the annealed battery substrate, the thin films comprising at least one electrolyte between a pair of electrodes, and the thin films adapted to generate or store an electrical charge. The thin films can also be annealed to remove defects in the thin films.
Claims20
A thin film battery manufacturing method comprising:
- (a) annealing a battery substrate to a temperature at which organic materials are burned off the battery substrate to clean the battery substrate, the battery substrate comprising a thickness of less than about 100 microns;
- and
- (b) forming a plurality of thin films on the annealed battery substrate, the thin films comprising at least one electrolyte between a pair of electrodes, and the thin films adapted to generate or store an electrical charge.
A thin film battery manufacturing method comprising:
- (a) depositing a thin film on a battery substrate, the battery substrate comprising a thickness of less than 100 microns, and the thin film comprising an electrode;
- and
- (b) annealing the thin film by heating the substrate to a temperature from about 150 to about 600° C., and that is sufficiently high to eliminate defects from the thin film.
A thin film battery manufacturing method comprising:
- (a) annealing a battery substrate to a temperature at which organic materials are burned off the battery substrate to clean the battery substrate, the battery substrate comprising a thickness of less than about 100 microns;
- (b) forming a thin film on the annealed battery substrate, the thin films comprising an electrode;
- and
- (c) annealing the thin film by heating the substrate to a temperature from about 150 to about 600° C., and that is sufficiently high to eliminate defects from the thin film.
Dependencies are inferred from the claim text.