Ion Source with Removable Anode Assembly
AssigneeVeeco Instruments Inc.
InventorsDavid Burtner, Scott Townsend, Daniel Siegfried
Life of this patent
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Abstract
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.
Claims28
A removable anode assembly for an ion source with a base assembly, the anode assembly comprising
- a pole piece removably attached to the base assembly;
- a thermal control plate;
- a gas distributor removably attached to the thermal control plate;
- and
- an anode removably attached to the thermal control plate and the pole piece and electrically insulated from the pole piece;
- wherein
- upon removing the pole piece from the base assembly, the pole piece, the thermal control plate, the gas distributor, and the anode are separable from the ion source as a unitary assembly.
A removable anode assembly for an ion source with a base assembly, the anode assembly comprising
- a pole piece defining four inner apertures and four outer apertures;
- a thermal control plate defining four outer apertures;
- a gas distributor removably attached to the thermal control plate;
- an anode defining four through-holes positioned between the pole piece and the thermal control plate;
- a first thermally conductive thermal transfer sheet between the gas distributor and the thermal control plate;
- a second thermally conductive thermal transfer sheet between the anode and the thermal control plate;
- a third thermally conductive thermal transfer sheet between the thermal control plate and the base assembly;
- four inner bolts adapted to pass through the four through-holes in the anode, the four inner apertures in the pole piece, and the four outer apertures in the thermal control plate to removably attach the anode to the pole piece and the thermal control plate;
- and
- four outer bolts adapted to pass through the four outer apertures in the pole piece to removably attach the pole piece to the base assembly, wherein
- upon removing the four outer bolts from attachment with the base assembly, the pole piece, the thermal control plate, the gas distributor, and the anode are separable from the ion source as a unitary assembly.
Dependencies are inferred from the claim text.